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Porous TiO₂ Thin Films Prepared by Spray Pyrolysis Deposition (SPD) Technique and their Application to UV Sensors

Masayuki Okuya ^a, Katsuyuki Shiozaki ^a, Nobuyuki Horikawa ^a, Tsuyoshi Kosugi ^b, G.R. Asoka Kumara ^a, János Madarász ^c, Shoji Kaneko ^a and György Pokol ^c

^a Department of Materials Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu, 432-8561 Japan
^b Research & Development Department, Star Micronics Co., Ltd., 20-10 Nakayoshida, Shizuoka 422-8654, Japan
^c Institute of General and Analytical Chemistry, Budapest University of Technology and Economics, Szt. Gellért tér 4, Budapest 1521, Hungary

Abstract

Porous TiO₂ thin films were prepared from titanium(IV)oxy acetylacetonate solutions by spray pyrolysis deposition (SPD) technique in air. The surface morphology and grain size of the film was easily controlled by changing species of solvent in the source solution. The TiO₂ film was employed as light absorbing i-layer for UV sensor to deposit CuO/TiO₂/SnO₂ p-i-n junction by SPD technique. We found that the surface morphology of TiO₂ layer was very much affective on UV response of the sensor, attributing to the light confinement in TiO₂ layer. Additionally, the response was further improved by reducing a carrier density in TiO₂ layer.

Solid State Ionics, Vol.172, pp.527-531 (2004).

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