Synthesis and characterization of Al doped ZnO terrace-truncated
nanocone structure by advanced spray pyrolysis deposition technique

Sameera Attanayake, Masayuki Okuya, and Kenji Murakami

Electronics and Materials Science Course, Department of Engineering, Graduate School of Integrated Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan

Abstract

We have synthesized a terrace-truncated nanocone structure of Al-doped ZnO using the advanced spray pyrolysis deposition technique. In this study, we proposed the growth mechanism of a terrace-truncated nanocone structure. The average top diameter is 35-40 nm and the height of the structure varies between 600-650 nm. The nanostructure was favored along the c-axis as confirmed by X-ray diffraction patterns. The electrical conductivity and optical transmittance in the visible range are 5.1×103 Ω-1·cm-1 and 80%, respectively. The proposed terrace-truncated nanocone structure of Al-doped ZnO has suitable characteristics for use as a transparent conductive oxide material.

Japanese Journal of Applied Physics, Vol.58, No.8, 080904 (2019).
DOI: https://iopscience.iop.org/article/10.7567/1347-4065/ab2e8a/meta